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[Japan Soc. Appl. Phys 1995 Symposium on VLSI Technology. Digest of Technical Papers - Kyoto, Japan (6-8 June 1995)] 1995 Symposium on VLSI Technology. Digest of Technical Papers - Copper integration into 0.5 μm BiCMOS technology

✍ Scribed by Gelatos, A.V.; Nguyen, B.-Y.; Perry, K.; Marsh, R.; Peschke, J.; Filipiak, S.; Travis, E.; Bhat, N.; La, L.B.; Thompson, M.; Saaranen, T.; Tobin, P.J.

Book ID: 126655348
Publisher: Japan Soc. Appl. Phys
Year: 1995
Weight: 271 KB
Category: Article
ISBN-13: 9780780326026
DOI: 10.1109/VLSIT.1995.520842

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