✦ LIBER ✦

Issues in fabricating electron devices with submicrometer dimensions

Book ID: 104265287
Publisher: Elsevier Science
Year: 1980
Tongue: English
Weight: 163 KB
Volume: 30
Category: Article
ISSN: 0042-207X
DOI: 10.1016/s0042-207x(80)80579-3

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✦ Synopsis

by successive masking and etching operations. The optical transmission characteristics of these diffractive filters are analysed and compared with rigorous diffraction theory. (Switzerland)

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