✦ LIBER ✦
A direct-write electron beam lithographic technique for the fabrication of CMOS-SOS devices with sub-micron gate dimensions
✍ Scribed by A.G. Brown; H. Willis; S.H. Mortimer; S.J. Till; F.D.J. Boller
- Book ID
- 107920380
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 524 KB
- Volume
- 9
- Category
- Article
- ISSN
- 0167-9317
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