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Isotopic tracing of Si during thermal growth of Si3N4 ultrathin films

✍ Scribed by I.J.R. Baumvol; L. Borucki; J. Chaumont; J.-J. Ganem; O. Kaytasov; N. Piel; S. Rigo; W.H. Schulte; F.C. Stedile; I. Trimaille

Book ID: 113287484
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 616 KB
Volume: 118
Category: Article
ISSN: 0168-583X
DOI: 10.1016/0168-583x(95)01478-0

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