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Isotope-modified silicon layers obtained by plasma enhanced chemical vapor deposition from gaseous silicon tetrafluoride

✍ Scribed by P. G. Sennikov; S. V. Golubev; V. I. Shashkin; D. A. Pryakhin; M. N. Drozdov; B. A. Andreev; H. -J. Pohl; O. N. Godisov


Book ID
111450514
Publisher
SP MAIK Nauka/Interperiodica
Year
2009
Tongue
English
Weight
163 KB
Volume
35
Category
Article
ISSN
1063-7850

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