Dynamic computer simulation of high ener
β
Wolfhard MΓΆller
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Article
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1989
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Elsevier Science
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English
β 407 KB
For the simulation of high ener~', high fluence implantations, dynamic codes are necessary which take into account the mod!fication of the substance due to the presence of the implants" and due to collisional effects. In the present paper, we give a brief description of such a binapy collision simul