For the simulation of high ener~', high fluence implantations, dynamic codes are necessary which take into account the mod!fication of the substance due to the presence of the implants" and due to collisional effects. In the present paper, we give a brief description of such a binapy collision simul
Molecular Dynamics Simulations of the Effects of Damage Relaxation Following High-Energy Implants
β Scribed by A.M. Mazzone
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 308 KB
- Volume
- 112
- Category
- Article
- ISSN
- 0021-9991
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