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Iron contamination in ion implanted silicon, as revealed by x-ray and electron diffraction

✍ Scribed by M. Servidori; F. Cembali; P. Negrini

Publisher: Springer
Year: 1986
Tongue: English
Weight: 856 KB
Volume: 39
Category: Article
ISSN: 1432-0630
DOI: 10.1007/bf00620734

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