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Potentialities of new X-ray diffraction methods in structural studies of ion-implanted silicon layers

โœ Scribed by Golovin, A. L. ;Imamov, R. M. ;Kondrashkina, E. A.


Publisher
John Wiley and Sons
Year
1985
Tongue
English
Weight
644 KB
Volume
88
Category
Article
ISSN
0031-8965

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