✦ LIBER ✦

IR study of ultrathin plasma SiO2 and plasma treated thermal SiO2 films

✍ Scribed by L.I. Popova; E.D. Atanassova; D.I. Kolev; B.M. Nikolova

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

IR study of plasma-nitrided thermal SiO2

✍ E.D. Atanassova; L.I. Popova; D.I. Kolev 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 594 KB

On the structure of thin plasma-treated

✍ Dr. L. I. Popova; Dr. E. D. Atanassova; Dr. S. K. Peneva; Dr. E. A. Tcukeva 📂 Article 📅 1988 🏛 John Wiley and Sons 🌐 English ⚖ 656 KB

Plasma nitridation of thin SiO2 films: A

✍ E.D. Atanassova; L.I. Popova 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 405 KB

Isotropic Plasma Etching of SiO2 Films

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Ultrathin SiO2 films on Si formed by N2O

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Plasma transformation of SiO films in Si

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