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Ionized physical vapor deposition (IPVD): magnetron sputtering discharges

✍ Scribed by Gudmundsson, J T

Book ID: 121437767
Publisher: Institute of Physics
Year: 2008
Tongue: English
Weight: 391 KB
Volume: 100
Category: Article
ISSN: 1742-6588
DOI: 10.1088/1742-6596/100/8/082002

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