Ionized physical-vapor deposition using a hollow-cathode magnetron source for advanced metallization

✍ Scribed by Klawuhn, E.; D’Couto, G. C.; Ashtiani, K. A.; Rymer, P.; Biberger, M. A.; Levy, K. B.

• Book ID: 121657413
• Publisher: AVS (American Vacuum Society)
• Year: 2000
• Tongue: English
• Weight: 870 KB
• Volume: 18
• Category: Article
• ISSN: 0734-2101
• DOI: 10.1116/1.582382