Flux and energy analysis of species in hollow cathode magnetron ionized physical vapor deposition of copper

✍ Scribed by Wu, L.; Ko, E.; Dulkin, A.; Park, K. J.; Fields, S.; Leeser, K.; Meng, L.; Ruzic, D. N.

• Book ID: 121657149
• Publisher: American Institute of Physics
• Year: 2010
• Tongue: English
• Weight: 611 KB
• Volume: 81
• Category: Article
• ISSN: 0034-6748
• DOI: 10.1063/1.3504371