✦ LIBER ✦
Ionized sputter deposition using an extremely high plasma density pulsed magnetron discharge
✍ Scribed by MacaÌk, Karol; Kouznetsov, Vladimir; Schneider, Jochen; Helmersson, Ulf; Petrov, Ivan
- Book ID
- 121311425
- Publisher
- AVS (American Vacuum Society)
- Year
- 2000
- Tongue
- English
- Weight
- 445 KB
- Volume
- 18
- Category
- Article
- ISSN
- 0734-2101
- DOI
- 10.1116/1.582380
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