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Ion-optical system with energy filtering for sputtering neutral and secondary ion mass spectrometers

✍ Scribed by T.Ya. Fishkova; L.P. Ovsyannikova; S.V. Pasovets; E.V. Shpak

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 176 KB
Volume: 298
Category: Article
ISSN: 0168-9002
DOI: 10.1016/0168-9002(90)90614-c

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