Low-energy ion optical system with a liquid-metal ion source for imaging and processing solid structures

✍ Scribed by W. Driesel

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 767 KB
• Volume: 52
• Category: Article
• ISSN: 0304-3991
• DOI: 10.1016/0304-3991(93)90022-p