Design of a 200 kV FIB system with a liquid metal ion source for IC process inspection

✍ Scribed by R. Mimura; H. Sawaragi; R. Aihara; M. Takai

• Publisher: Elsevier Science
• Year: 1993
• Tongue: English
• Weight: 282 KB
• Volume: 21
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(93)90056-b