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Ion irradiation of porous silicon: The role of surface states

✍ Scribed by L.G. Jacobsohn; B.L. Bennett; D.W. Cooke; R.E. Muenchausen; M. Nastasi


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
127 KB
Volume
242
Category
Article
ISSN
0168-583X

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✦ Synopsis


Porous Si was obtained by electrochemical etching of p-doped Si(1 0 0) and progressively irradiated with H + , He + or Ne 2+ ions. Photoluminescence (PL) spectra were obtained as a function of the displacement-per-atom parameter up to $0.01 level, which nearly extinguished emission. The PL quenching efficiency, which showed a dependence on the chemical nature of the implanted species, was correlated with the self-recovery of the defects as investigated by channeling spectrometry. Emission recovery and enhancement after irradiation indicated the importance of surface states in the PL mechanism.


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