Effect of chemical etching combined with
✍
J.Q. Duan; B.R. Zhang; L.Z. Zhang; J.C. Mao; G.G. Qin
📂
Article
📅
1993
🏛
Elsevier Science
🌐
English
⚖ 174 KB
We have fabricated porous silicon layers (PSLs) in the anodizing solution, HF(48wt.\%): \(\mathrm{H}_{2} \mathrm{O}=1: 1\). After anodization, the PSL was etched in the same chemical solution as used for anodization and then illuminated with the \(476.5 \mathrm{~nm}\) line, with a power of \(20 \mat