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Ion implantation in AlxGa1-xAs: damage structures and amorphization mechanisms

โœ Scribed by Lagow, B.W.; Turkot, B.A.; Robertson, I.M.; Coleman, J.J.; Roh, S.D.; Forbes, D.V.; Rehn, L.E.; Baldo, P.M.


Book ID
117866187
Publisher
IEEE
Year
1998
Tongue
English
Weight
311 KB
Volume
4
Category
Article
ISSN
1077-260X

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