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Ion implantation and thermal annealing in silicon carbide and gallium nitride

✍ Scribed by W Jiang; W.J Weber; S Thevuthasan

Book ID: 114164389
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 330 KB
Volume: 178
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(00)00451-1

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