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Effects of ion implantation and thermal annealing on the photoluminescence in amorphous silicon nitride

✍ Scribed by K. S. Seol; T. Futami; T. Watanabe; Y. Ohki; M. Takiyama


Book ID
121858835
Publisher
American Institute of Physics
Year
1999
Tongue
English
Weight
247 KB
Volume
85
Category
Article
ISSN
0021-8979

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