𝔖 Bobbio Scriptorium
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Ion beam synthesis of buried CrSi2 layers

✍ Scribed by Chr. Dudda; S. Mantl; Ch. Dieker; M. Dolle; H. Lüth


Book ID
113283487
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
274 KB
Volume
80-81
Category
Article
ISSN
0168-583X

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Ion beam synthesis of Si3N4 amorphous bu
✍ A.I. Belogorokhov; A.B. Danilin; V.N. Mordkovich; O.I. Vyletalina 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 117 KB

It was demonstrated that it is possible to prevent the crystallization of buried Si3N 4 layers formed by N ÷ implantation with E--150 keV, • ---5.0 × 1017 N+cm 2 and TA = 1200 °C (2 h). To achieve this, preliminary implantation with E = 150 keV and •/> 5.0 x 1016 O + cm 2 has to be carried out. Radi