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Ion beam measurements of Sn/In ratios in indium tin oxide films prepared by pulsed-laser deposition

โœ Scribed by X.T. Ren; M.B. Huang; S. Amadon; W.A. Lanford; M.A. Morales Paliza; L.C. Feldman


Book ID
114164383
Publisher
Elsevier Science
Year
2001
Tongue
English
Weight
172 KB
Volume
174
Category
Article
ISSN
0168-583X

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Indium tin oxide (ITO) films were produced by low-energy oxygen ion beam assisted electron-beam evaporation. The dependence of surface morphology, electrical and optical properties on evaporation rate, oxygen ion beam energy and density, as well as substrate temperatures was characterized by atomic