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Ion-beam-induced simultaneous epitaxial growth of α- and cubic FeSi2 in Si (100) at 320°C

✍ Scribed by J. Desimoni; M. Behar; H. Bernas; X.W. Lin; Z. Liliental-Weber; J. Washburn


Book ID
113283485
Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
323 KB
Volume
80-81
Category
Article
ISSN
0168-583X

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