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Low-temperature ion-induced epitaxial growth of α-FeSi2 and cubic FeSi2 in Si

✍ Scribed by Lin, X. W.; Behar, M.; Desimoni, J.; Bernas, H.; Washburn, J.; Liliental-Weber, Z.


Book ID
121331116
Publisher
American Institute of Physics
Year
1993
Tongue
English
Weight
724 KB
Volume
63
Category
Article
ISSN
0003-6951

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