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Ion beam induced desorption from thin films: SiO2 single layers and SiO2/Si multilayers

✍ Scribed by W.M. Arnoldbik; N. Tomozeiu; F.H.P.M. Habraken


Book ID
114165525
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
245 KB
Volume
190
Category
Article
ISSN
0168-583X

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