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Electroluminescence from thin SiO2 layers after Si- and C-coimplantation

✍ Scribed by T. Gebel; L. Rebohle; J. Sun; W. Skorupa

Book ID: 104428243
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 157 KB
Volume: 16
Category: Article
ISSN: 1386-9477
DOI: 10.1016/s1386-9477(02)00639-2

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