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Ion beam effects in polymer films: Structure evolution of the implanted layer

✍ Scribed by V.N. Popok; V.B. Odzhaev; I.P. Kozlov; I.I. Azarko; I.A. Karpovich; D.V. Sviridov

Book ID
114169226
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
483 KB
Volume
129
Category
Article
ISSN
0168-583X

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A dense organic film was prepared by plasma polymerization of pyrrole. A 20 keV I Ο© implantation at a fluence of 1 Ο« 10 16 ions cm Οͺ2 was used to produce a conducting surface layer due to doping. The characteristics of the implanted layer have been investigated using ion beam analysis techniques, X-