𝔖 Bobbio Scriptorium
✦   LIBER   ✦

The effect of ion implantation on polymer mask resistance to ion beam etching

✍ Scribed by TB Borzenko; AF Vyatkin; NN Gonchakova; VI Zinenko; Yu I Koval; VA Kudryashov

Publisher
Elsevier Science
Year
1988
Tongue
English
Weight
356 KB
Volume
38
Category
Article
ISSN
0042-207X

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Effect of ion energy on the implantation
Effect of ion energy on the implantation products of benzene
✍ O. Puglisi; G. Marletta; S. Pignataro; G. Foti; A. Trovato; E. Rimini πŸ“‚ Article πŸ“… 1981 πŸ› Elsevier Science 🌐 English βš– 442 KB

Sohd benzene has been unplanted with mert-gas Ions atth energes rangmg from 16 to 100 keV Ihe small varuuon observed UI the relarwe concentration of the products has been found to depend mamly on The fact that the r&awe acsht of the nuclear and electromc noppmg mechantsms IS changmg along the ener\_