The mechanism of the ion beam inhibited etching formation in Gallium-FIB implanted resist films

✍ Scribed by Khalil Arshak; Miroslav Mihov; Shohei Nakahara; Arous Arshak; Declan McDonagh

• Book ID: 108207421
• Publisher: Elsevier Science
• Year: 2005
• Tongue: English
• Weight: 296 KB
• Volume: 78-79
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2004.12.091