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Ion beam deposition of crystallographically aligned nano-crystalline silicon films

✍ Scribed by H.R. Khan; H. Frey

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 351 KB
Volume: 81
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(95)02490-5

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