✦ LIBER ✦

Ion beam assisted deposition of tantalum nitride thin films for vacuum microelectronics devices

✍ Scribed by Y Gotoh; K Kagamimori; H Tsuji; J Ishikawa

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Ion-beam-assisted deposition of molybden

✍ E.P. Donovan; G.K. Hubler; M.S. Mudholkar; L.T. Thompson 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 559 KB

Ion-beam-assisted deposition of Al2O3 th

✍ Rabi S. Bhattacharya; A.K. Rai; A.W. McCormick 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 554 KB

A low temperature study of electron tran

✍ K. Lal; P. Ghosh; D. Biswas; A.K. Meikap; S.K. Chattopadhyay; S.K. Chatterjee; M 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 156 KB

Ion-beam-assisted sputter deposition of

✍ A.M. Ektessabi 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 705 KB

Properties of thin films of tantalum oxi

✍ P.J. Martin; A. Bendavid; M. Swain; R.P. Netterfield; T.J. Kinder; W.G. Sainty; 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 443 KB

Characterization of niobium nitride thin

✍ A. Cavalleri; F. Giacomozzi; L. Guzman; F. Marchetti; P.M. Ossi 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 483 KB