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Properties of thin films of tantalum oxide deposited by ion-assisted deposition

✍ Scribed by P.J. Martin; A. Bendavid; M. Swain; R.P. Netterfield; T.J. Kinder; W.G. Sainty; D. Drage; L. Wielunski


Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
443 KB
Volume
239
Category
Article
ISSN
0040-6090

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