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Ion beam annealing of Ga-implanted Si

✍ Scribed by S.P. Withrow; O.W. Holland; S.J. Pennycook

Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 446 KB
Volume: 43
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(89)90210-9

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