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Supersaturated Si-As alloy formation by ion implantation and pulsed electron beam annealing

✍ Scribed by A. Turos; O. Meyer; J. Geerk

Publisher: Springer
Year: 1982
Tongue: English
Weight: 339 KB
Volume: 28
Category: Article
ISSN: 1432-0630
DOI: 10.1007/bf00617137

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