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Ion-assisted sputtering of TiN films

✍ Scribed by J. Musil; S. Kadlec; V. Valvoda; R. Kužel Jr.; R. Černý

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

A comparison of TiN films produced by re

✍ A.V. Bieli; H. Kheyrandish; J.S. Colligon 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 635 KB

Structure and optical properties of TiN

✍ M Bonelli; LA Guzman; A Miotello; L Calliari; M Elena; PM Ossi 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 516 KB

Ion-beam-assisted sputter deposition of

✍ A.M. Ektessabi 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 705 KB

Low temperature growth of highly oriente

✍ G.I. Grigorov; I.N. Martev; M.V. Stoyanova; J.-L. Vignes; J.-P. Langeron 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 675 KB

Oxidation of TiN thin films in an ion-be

✍ Hiroshi Kubota; Masanori Nagata; Ryuji Miyagawa; Marc Aurele Nicolet 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 341 KB

Investigation of Tin films reactively sp

✍ K.Y. Ahn; M. Wittmer; C.Y. Ting 📂 Article 📅 1983 🏛 Elsevier Science 🌐 English ⚖ 637 KB