## Three areas will be reviewed where the use of megaelectronvolt ion beams has contributed to the understanding of the properties of amorphous silicon: (1) thermodynamic and relaxation effects; (2) thermal and radiation-enhanced diffusion; (3) interracial segregation. trating on the segregation a
โฆ LIBER โฆ
Ion-assisted recrystallization of amorphous silicon
โ Scribed by F. Priolo; C. Spinella; A. La Ferla; E. Rimini; G. Ferla
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 682 KB
- Volume
- 43
- Category
- Article
- ISSN
- 0169-4332
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