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Ion Assisted Reactive Magnetron Sputtering as a Deposition Method for High Quality Thin Films of Compound Semiconductors

✍ Scribed by Ellmer, K.

Book ID: 121863659
Publisher: Trans Tech Publications, Ltd.
Year: 1999
Tongue: English
Weight: 547 KB
Volume: 67-68
Category: Article
ISSN: 1662-9779
DOI: 10.4028/www.scientific.net/SSP.67-68.261

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