✦ LIBER ✦
Unusual magnetron sputtered a-Si:H materials obtained at high deposition rates as favourable precursors for the preparation of large-grain-size crystallized thin silicon films
✍ Scribed by M. Cuniot; J. Dixmier; P. Elkaim
- Book ID
- 115988954
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 251 KB
- Volume
- 164-166
- Category
- Article
- ISSN
- 0022-3093
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