𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Iodine-catalyzed chemical vapor deposition of Cu on MPTMS monolayer surface in a low deposition temperature regime

✍ Scribed by H.J. Park; H.J. Shin; H.S. Jung; C. Kim; M.M. Sung; C.M. Lee; H.S. Soh; J.G. Lee


Book ID
104094003
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
993 KB
Volume
201
Category
Article
ISSN
0257-8972

No coin nor oath required. For personal study only.


πŸ“œ SIMILAR VOLUMES


Chemistry and kinetics of chemical vapor
✍ A. Becker; K.J. HΓΌttinger πŸ“‚ Article πŸ“… 1998 πŸ› Elsevier Science 🌐 English βš– 924 KB

## Pyrocarbon deposition from propylene and benzene was studied at ambient pressure and 1000Β°C using a vertical hot-wall reactor. Initial partial pressures of the hydrocarbons and residence time were varied; the influence of hydrogen in the feed gas was additionally studied. Gaseous and liquid rea