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The Effect of Substrate on the Low-Temperature Carbon Nanomaterials Growth by Microwave Excited Surface-wave Plasma Chemical Vapor Deposition

โœ Scribed by Bekarevich, R V; Miura, S; Ogino, A; Rahachou, A U; Nagatsu, M


Book ID
120155802
Publisher
Institute of Physics
Year
2013
Tongue
English
Weight
942 KB
Volume
417
Category
Article
ISSN
1742-6588

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Effect of nickel thickness and microwave
โœ J.H. Huang; C.C. Chuang; C.H. Tsai ๐Ÿ“‚ Article ๐Ÿ“… 2003 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 631 KB

The effect of Ni thickness and microwave power on the growth of carbon nanotubes (CNTs) by microwaveheated chemical vapor deposition is reported. A 5-100-nm-thick nickel layer was deposited with an e-gun in a 26 vacuum of 10 Torr. It was found that the diameter and length of CNTs increase with Ni la