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Investigations of the effect of hydrogen, nitrogen or oxygen on the in-depth profile analysis by radiofrequency argon glow discharge-optical emission spectrometry

✍ Scribed by Fernández, Beatriz; Bordel, Nerea; Pereiro, Rosario; Sanz-Medel, Alfredo


Book ID
120448227
Publisher
Royal Society of Chemistry
Year
2003
Tongue
English
Weight
286 KB
Volume
18
Category
Article
ISSN
0267-9477

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✍ Wagatsuma, Kazuaki 📂 Article 📅 1999 🏛 John Wiley and Sons 🌐 English ⚖ 128 KB 👁 2 views

A novel technique for accurate in-depth analysis of thin layers is described. Radiofrequency voltages applied to a Grimm-style glow discharge lamp are modulated at a very low frequency, which leads to a reduction in the sputtering rate and variation of the emission signals at the speciÐc modulation