In-depth profile analysis of thin films deposited on non-conducting glasses by radiofrequency glow-discharge–optical emission spectrometry

Depth profiling of thin surface layers u

Depth profiling of thin surface layers using the amplitude modulation method in radiofrequency-powered glow discharge optical emission spectrometry

✍ Wagatsuma, Kazuaki 📂 Article 📅 1999 🏛 John Wiley and Sons 🌐 English ⚖ 128 KB 👁 2 views

A novel technique for accurate in-depth analysis of thin layers is described. Radiofrequency voltages applied to a Grimm-style glow discharge lamp are modulated at a very low frequency, which leads to a reduction in the sputtering rate and variation of the emission signals at the speciÐc modulation