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In�depth profile analysis by radiofrequency glow discharge optical emission spectrometry using pressure as variable parameter

✍ Scribed by Pisonero, Jorge; P�rez, Covadonga; Pereiro, Rosario; Bordel, Nerea; Sanz�Medel, Alfredo


Book ID
120454210
Publisher
Royal Society of Chemistry
Year
2001
Tongue
English
Weight
129 KB
Volume
16
Category
Article
ISSN
0267-9477

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✍ Wagatsuma, Kazuaki 📂 Article 📅 1999 🏛 John Wiley and Sons 🌐 English ⚖ 128 KB 👁 2 views

A novel technique for accurate in-depth analysis of thin layers is described. Radiofrequency voltages applied to a Grimm-style glow discharge lamp are modulated at a very low frequency, which leads to a reduction in the sputtering rate and variation of the emission signals at the speciÐc modulation