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Investigations of Interface States in Si/Si-Oxynitride/Al Structures Using DLTS

✍ Scribed by Ufert, K.-D. ;Ecke, W. ;Manzel, M. ;Michalke, W. ;Salm, J.

Publisher: John Wiley and Sons
Year: 1986
Tongue: English
Weight: 188 KB
Volume: 98
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2210980152

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