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Investigation on the synthesis mechanism of β-FeSi2prepared by pulsed laser deposition

✍ Scribed by Youhua Zhou; Chu Nie; Huyong Tian; Haoshuang Gu

Book ID
113091381
Publisher
Wuhan University
Year
2012
Tongue
English
Weight
717 KB
Volume
17
Category
Article
ISSN
1007-1202

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✍ M. Zakir Hossain; H. Katsumata; S. Uekusa 📂 Article 📅 2011 🏛 Elsevier 🌐 English ⚖ 665 KB

Ecological friendly -FeSi 2 thin film has been formed on FZ-Si (111) substrates using sintered FeSi 2 (purity 99.99%) and electrolytic Fe (purity 99.99%) targets by pulsed laser deposition (PLD) method in an ArF ( 193 nm) excimer laser. Subsequently the prepared thin films were annealed at 900 o C.