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Formation of β-FeSi[sub 2] films by pulsed laser deposition using iron target

✍ Scribed by Liu, Zhengxin; Okoshi, Masayuki; Hanabusa, Mitsugu


Book ID
121813016
Publisher
AVS (American Vacuum Society)
Year
1999
Tongue
English
Weight
353 KB
Volume
17
Category
Article
ISSN
0734-2101

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The effect of crystalline structure on p
✍ M. Zakir Hossain; H. Katsumata; S. Uekusa 📂 Article 📅 2011 🏛 Elsevier 🌐 English ⚖ 665 KB

Ecological friendly -FeSi 2 thin film has been formed on FZ-Si (111) substrates using sintered FeSi 2 (purity 99.99%) and electrolytic Fe (purity 99.99%) targets by pulsed laser deposition (PLD) method in an ArF ( 193 nm) excimer laser. Subsequently the prepared thin films were annealed at 900 o C.