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Optical characterization of β-FeSi2 thin films prepared on fused quartz by femtosecond laser ablation

✍ Scribed by Youhua Zhou; Peixiang Lu; Guang Yang; Hua long; Qiguang Zheng


Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
505 KB
Volume
399
Category
Article
ISSN
0921-4526

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Beta iron disilicide (b-FeSi 2 ) is one of the candidate materials for a compound semiconductor, which is promising for optoelectronic devices. b-FeSi 2 film has been obtained by ion beam sputter deposition (IBSD) on Si(1 0 0) substrates that are pre-treated by sputter etching by Ne + . In the prese