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Investigation on surface morphology of sputtered YBa2Cu3Ox thin and ultrathin films

โœ Scribed by J. Gao; W.H. Wong

Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
504 KB
Volume
251
Category
Article
ISSN
0921-4534

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Morphology, structure, and electrical pr
Morphology, structure, and electrical properties of YBa2Cu3Ox thin films on tilted NdGaO3 substrates, deposited by DC-sputtering
โœ Peter B. Mozhaev; Iosif M. Kotelyanskii; Valery A. Luzanov; Julia E. Mozhaeva; T ๐Ÿ“‚ Article ๐Ÿ“… 2005 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 273 KB

Thin YBa 2 Cu 3 O x (YBCO) films were deposited using DC-sputtering technique on NdGaO 3 substrates, tilted from (1 1 0) orientation by 0-26ยฐ. The structure and surface quality of the substrates were carefully characterized to obtain reliable results of thin films deposition. Structural, morphologic